.o.R. NIST -- National Institute of Standards and Technology, data.nist.gov (Standard Reference / public data, DCAT/NERDm). {"@context":["https://data.nist.gov/od/dm/nerdm-pub-context.jsonld",{"@base":"ark:/88434/mds1098dkc"}],"_schema":"https://data.nist.gov/od/dm/nerdm-schema/v0.7#","_extensionSchemas":["https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/PublicDataResource"],"@type":["nrdp:PublicDataResource"],"@id":"ark:/88434/mds1098dkc","doi":"doi:10.18434/T4/1502429","title":"Model-Based Optical Metrology in R: M.o.R.","contactPoint":{"fn":"Mark Alexander Henn","hasEmail":"mailto:mark.henn@nist.gov"},"modified":"2018-01-24","ediid":"6388F53FD1DBB474E0531A57068183FF1887","landingPage":"https://data.nist.gov/od/id/6388F53FD1DBB474E0531A57068183FF1887","description":["Reliable optical critical dimension (OCD) metrology in the regime where the inspection wavelength λ is much larger than the critical dimensions (CDs) of the measurand is only possible using a model-based approach. Due to the complexity of the models involved, that often require solving Maxwell's equations, many applications use a library based look-up approach. Here, the best experiment-to-theory fit is found by comparing the measurement data to a library consisting of pre-calculated simulations. One problem with this approach is that it makes the accuracy of the solution dependent on the refinement of the grid. Interpolating between library values requires a uniform grid in most cases, and can also be very time-consuming. We present an approach based on radial basis functions that is fast, accurate and most importantly works on arbitrary grids. The method is implemented in a application based on the programming language R, that additionally allows for Bayesian data analysis, and provides multiple diagnostics."],"keyword":["statistics","model-based metrology"],"theme":["Mathematics and Statistics:Uncertainty quantification","Mathematics and Statistics:Numerical methods and software","Mathematics and Statistics:Statistical analysis"],"topic":[],"accessLevel":"public","license":"https://www.nist.gov/open/license","components":[{"accessURL":"https://doi.org/10.18434/T4/1502429","format":"text/html","description":"DOI Access to Model-Based Optical Metrology in R: M.o.R.","title":"DOI Access to Model-Based Optical Metrology in R: M.o.R.","@type":["nrd:Hidden","dcat:Distribution"],"@id":"#doi:10.18434/T4/1502429"},{"filepath":"MoR_Documentation.pdf","checksum":{"hash":"3dc60389ef90074ed2e0b2260db29f1d6f177c24953031f95f383835e560d997","algorithm":{"tag":"sha256","@type":"Thing"}},"mediaType":"application/pdf","downloadURL":"https://data.nist.gov/od/ds/6388F53FD1DBB474E0531A57068183FF1887/MoR_Documentation.pdf","size":1787951,"@id":"cmps/MoR_Documentation.pdf","@type":["nrdp:DataFile","nrdp:DownloadableFile","dcat:Distribution"],"_extensionSchemas":["https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"]},{"filepath":"sourcecode.zip","checksum":{"hash":"1304da9c8889e786550b2086d7cadb5d987380bae847f8e9f2c2207d08ed812c","algorithm":{"tag":"sha256","@type":"Thing"}},"mediaType":"application/zip","downloadURL":"https://data.nist.gov/od/ds/6388F53FD1DBB474E0531A57068183FF1887/sourcecode.zip","size":14939,"@id":"cmps/sourcecode.zip","@type":["nrdp:DataFile","nrdp:DownloadableFile","dcat:Distribution"],"_extensionSchemas":["https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"]},{"description":"SHA-256 checksum value for MoR_Documentation.pdf","@id":"cmps/MoR_Documentation.pdf.sha256","_extensionSchemas":["https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"],"algorithm":{"@type":"Thing","tag":"sha256"},"filepath":"MoR_Documentation.pdf.sha256","checksum":{"hash":"7106dc5308bafdf2175a67088426fcef7c8f303b077dee5acc3441799a994f90","algorithm":{"tag":"sha256","@type":"Thing"}},"mediaType":"text/plain","downloadURL":"https://data.nist.gov/od/ds/6388F53FD1DBB474E0531A57068183FF1887/MoR_Documentation.pdf.sha256","describes":"cmps/MoR_Documentation.pdf","size":64,"@type":["nrdp:ChecksumFile","nrdp:DownloadableFile","dcat:Distribution"],"valid":true},{"description":"SHA-256 checksum value for sourcecode.zip","@id":"cmps/sourcecode.zip.sha256","_extensionSchemas":["https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"],"algorithm":{"@type":"Thing","tag":"sha256"},"filepath":"sourcecode.zip.sha256","checksum":{"hash":"0757b5e481a5071ecaa119fa18be4e0628bc54e97e009eb7524b25b8e5abed85","algorithm":{"tag":"sha256","@type":"Thing"}},"mediaType":"text/plain","downloadURL":"https://data.nist.gov/od/ds/6388F53FD1DBB474E0531A57068183FF1887/sourcecode.zip.sha256","describes":"cmps/sourcecode.zip","size":64,"@type":["nrdp:ChecksumFile","nrdp:DownloadableFile","dcat:Distribution"],"valid":true}],"publisher":{"name":"National Institute of Standards and Technology","@type":"org:Organization"},"language":["en"],"bureauCode":["006:55"],"programCode":["006:045"],"version":"1.0.0"},